JPH0441263B2 - - Google Patents
Info
- Publication number
- JPH0441263B2 JPH0441263B2 JP6599686A JP6599686A JPH0441263B2 JP H0441263 B2 JPH0441263 B2 JP H0441263B2 JP 6599686 A JP6599686 A JP 6599686A JP 6599686 A JP6599686 A JP 6599686A JP H0441263 B2 JPH0441263 B2 JP H0441263B2
- Authority
- JP
- Japan
- Prior art keywords
- air
- wall
- capsule
- peripheral wall
- flow
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000002775 capsule Substances 0.000 claims description 21
- 239000000428 dust Substances 0.000 claims description 19
- 230000002093 peripheral effect Effects 0.000 claims description 9
- 238000007664 blowing Methods 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000009423 ventilation Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000012716 precipitator Substances 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B5/00—Cleaning by methods involving the use of air flow or gas flow
Landscapes
- Ventilation (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6599686A JPS62225838A (ja) | 1986-03-26 | 1986-03-26 | エア−シヤワ−装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6599686A JPS62225838A (ja) | 1986-03-26 | 1986-03-26 | エア−シヤワ−装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS62225838A JPS62225838A (ja) | 1987-10-03 |
JPH0441263B2 true JPH0441263B2 (en]) | 1992-07-07 |
Family
ID=13303127
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6599686A Granted JPS62225838A (ja) | 1986-03-26 | 1986-03-26 | エア−シヤワ−装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62225838A (en]) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0222405A (ja) * | 1988-07-11 | 1990-01-25 | Nisshin Steel Co Ltd | 微粉製造装置 |
JP2509883Y2 (ja) * | 1991-07-18 | 1996-09-04 | 鹿島建設株式会社 | エア―シャワ―装置 |
KR100192962B1 (ko) * | 1995-12-29 | 1999-06-15 | 윤종용 | 능동 구동형 에어 크린 룸 및 그 제어 방법 |
DE29909803U1 (de) * | 1999-06-04 | 2000-08-17 | Rudolf Otto Meyer GmbH & Co. KG, 22047 Hamburg | Schleuse für Reinraum-Anlagen |
JP2002364895A (ja) * | 2001-06-05 | 2002-12-18 | Nippon Kiki:Kk | エアーシャワー装置 |
JP4833660B2 (ja) * | 2005-12-26 | 2011-12-07 | 財団法人電力中央研究所 | 空気回転ドア装置 |
CN103143542B (zh) * | 2013-03-19 | 2015-09-02 | 苏州市易柯露环保科技有限公司 | 立式集气除臭成套装置 |
-
1986
- 1986-03-26 JP JP6599686A patent/JPS62225838A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS62225838A (ja) | 1987-10-03 |
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